Multipole Confined Diffusion Plasma Produced By 13.56 MHz Electrodeless Source

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 7, Issue 6, 1989, Pages 3345-3350

  Boswell, R W ^a   Perry, A J ^a   Emami, M ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957231715     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576148     Document Type: Article

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