Downstream physics of the helicon discharge

Plasma Sources Science and Technology

Volumn 5, Issue 2, 1996, Pages 173-180

  Chen, Francis F ^a   Sudit, Isaac D ^a   Light, Max ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; PLASMA WAVES;

ELECTRON TEMPERATURE; HELICON DISCHARGES; PLASMA ENERGY BALANCE; PLASMA PARTICLE BALANCE;

PLASMA SOURCES;

EID: 0030134321     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/2/009     Document Type: Article

References (17)

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2. Lieberman M A and Gottscho R A 1994 Design of high density plasma sources for materials processing Physics of Thin Films (New York: Academic)
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