Role of excitation frequency in a low-pressure, inductively coupled radio-frequency, magnetized plasma

Applied Physics Letters

Volumn 63, Issue 17, 1993, Pages 2330-2332

  Cui, Chunshi ^a   Boswell, R W ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009968335     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.110516     Document Type: Article

References (13)