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Journal of Applied Physics

Volumn 73, Issue 11, 1993, Pages 7188-7194

Limits to ion energy control in high density glow discharges: Measurement of absolute metastable ion concentrations

(5) Giapis, Konstantinos P a Sadeghi, Nader a Margot, Joëlle a Gottscho, Richard A a Lee, T C John a

a LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008656859 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.352391 Document Type: Article

Times cited : (29)

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