dc probe detection of phased EEDFs in RF discharges

Plasma Physics and Controlled Fusion

Volumn 39, Issue 10, 1997, Pages 1533-1550

  Chen, Francis F ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; ELECTRON ENERGY LEVELS; FUNCTIONS; PROBES;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS (EEDF); LANGMUIR PROBES; RADIO FREQUENCY (RF) DISCHARGES;

PLASMA SOURCES;

EID: 0031247310     PISSN: 07413335     EISSN: None     Source Type: Journal    
DOI: 10.1088/0741-3335/39/10/004     Document Type: Article

References (6)

1. Chen F F and Chevalier G 1992 J. Vac. Sci. Technol. A 10 1389
2. Chen F F 1991 Plasma Phys. Control. Fusion 33 339
3. Ellingboe A R, Boswell R W, Booth J P and Sadeghi N 1995 Phys. Plasmas 2 1807
4. Sudit I D and Chen F F 1994 Plasma Sources Sci. Technol. 3 162
5. Hershkowitz N 1989 Plasma Diagnostics vol 1, ed O Auciello and D L Flamm (New York: Academic) ch 3
6. Tonks L and Langmuir I 1929 Phys. Rev. 34 876