Efficient production of O+ and O- ions in a helicon wave oxygen discharge

Applied Physics Letters

Volumn 69, Issue 5, 1996, Pages 617-619

  Mieno, T ^a   Kamo, T ^b,c   Hayashi, D ^b   Shoji, T ^b   Kadota, K ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

^c MITSUBISHI HEAVY INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000662169     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117925     Document Type: Article

References (15)

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