Magnetron sputtering of ZnO films

Springer Series in Materials Science

Volumn 104, Issue , 2008, Pages 187-233

  Szyszka, B ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Discharge power; Magnetron sputtering; Oxygen partial pressure; Substrate temperature; Thin solid film

Indexed keywords

EID: 85072820903     PISSN: 0933033X     EISSN: 21962812     Source Type: Book Series    
DOI: 10.1007/978-3-540-73612-7_5     Document Type: Chapter

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