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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 2, 2001, Pages 414-419

Properties of aluminum-doped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering

(3) Malkomes, N a Vergohl M a Szyszka, B a

a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY MEASUREMENT; EMISSION SPECTROSCOPY; LIGHT EMISSION; MAGNETRON SPUTTERING; PLASMA APPLICATIONS; SPUTTER DEPOSITION; SUBSTRATES; TRANSPARENCY; ZINC OXIDE;

TRANSPARENT CONDUCTING OXIDE;

CONDUCTIVE FILMS;

EID: 0035272223 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1339019 Document Type: Article

Times cited : (37)

References (28)

1
- 0001590465
- (1996) J. Appl. Phys. , vol.80 , pp. 1063
- Gupta, V.¹

2
- 0025493371
- (1990) J. Mater. Res. , vol.5 , pp. 1929
- Bertolotti, M.¹ Laschena, M.V.² Rossi, M.³ Ferrari, A.⁴ Qian, L.S.⁵ Quaranta, F.⁶ Valentini, A.⁷

3
- 0031145305
- (1997) Thin Solid Films , vol.300 , pp. 30
- Weissenrieder, K.-S.¹ Müller, J.²

4
- 0005013404
- (1993) J. Phys. , vol.4 , pp. 485
- Deschanvres, J.L.¹ Bochu, B.² Coubert, J.C.³

5
- 0018495392
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 994
- Aranovich, J.¹ Ortiz, A.² Bube, R.H.³

6
- 0001507063
- (1996) J. Mater. Chem. , vol.6 , pp. 1135
- O'Brien, P.¹ Saeed, T.² Knowles, J.³

7
- 0030192029
- (1996) J. Mater. Sci. , vol.31 , pp. 3651
- Nishio, K.¹ Miyake, S.² Sei, T.³ Watanabe, Y.⁴ Tsuchiya, T.⁵

8
- 0030125272
- (1996) J. Ceram. Soc. Jpn. , vol.104 , pp. 296
- Ohyama, M.¹ Kozuka, H.² Yoko, T.³

9
- 0031197973
- (1997) Thin Solid Films , vol.306 , pp. 78
- Ohyama, M.¹ Kozuka, H.² Yoko, T.³

10
- 0032099920
- (1998) J. Am. Ceram. Soc. , vol.81 , pp. 1622
- Ohyama, M.¹ Kozuka, H.² Yoko, T.³

11
- 0028274458
- (1994) Thin Solid Films , vol.238 , pp. 83
- Tang, W.¹ Cameron, D.C.²

12
- 0028485724
- (1994) J. Mater. Sci. , vol.29 , pp. 4099
- Ohya, Y.¹ Saiki, H.² Takahashi, Y.³

13
- 0030128764
- (1996) J. Am. Ceram. Soc. , vol.79 , pp. 825
- Ohya, Y.¹ Saiki, H.² Tanaka, Y.³ Takahashi, Y.⁴

14
- 79151469093
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 6611
- Takahashi, Y.¹ Kanamori, M.² Kondoh, A.³ Minoura, H.⁴ Ohya, Y.⁵

15
- 0033170248
- (1999) Thin Solid Films , vol.351 , pp. 125
- Schuler, T.¹ Aegerter, M.A.²

16
- 0009831788
- (1996) J. Appl. Phys. , vol.80 , pp. 787
- Hayamizu, S.¹ Tabata, H.² Tanaka, H.³ Kawai, T.⁴

17
- 0005013405
- (1997) J. Non-Cryst. Solids , vol.218 , pp. 74
- Szyzska¹

18
- 0030420019
- (1996) Mater. Res. Soc. Symp. Proc. , vol.426 , pp. 411
- Nakada, T.¹ Murakami, N.² Kunioka, A.³

19
- 0021370957
- (1984) J. Appl. Phys. , vol.55 , pp. 1029
- Nanto, H.¹

20
- 0033170232
- (1999) Thin Solid Films , vol.351 , pp. 164
- Szyszka, B.¹

21
- 0000940095
- (1989) Vacuum , vol.39 , pp. 954
- Larsson, T.¹

22
- 0023457156
- (1987) Surf. Coat. Technol. , vol.33 , pp. 405
- Schiller, S.¹ Heisig, U.² Korndörfer, C.³ Beister, G.⁴ Reschke, J.⁵ Steinfelder, K.⁶ Strümpfel, J.⁷

23
- 0000718331
- (2001) J. Appl. Phys. , vol.89 , pp. 732
- Malkomes, N.¹ Vergöhl, M.²

24
- 0000653583
- (1992) J. Mater. Sci. Lett. , vol.11 , pp. 263
- Bellingham, J.R.¹ Phillips, W.A.² Atkins, C.J.³

25
- 0003685375
- Springer, Berlin
- (1996) Semiconductors - Basic Data
- Madelung, O.¹

26
- 0003704458
- Prentice Hall, New Jersey
- (1994) Semiconductor Optoelectronic Devices
- Bhattacharya, P.¹

27
- 0031166469
- (1997) J. Mater. Res. , vol.12 , pp. 1425
- Srikant, V.¹ Clarke, R.²

28
- 0004040706
- Academic, New York
- (1985) Handbook of Optical Constants of Solids
- Palik, D.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.