Highly transparent and conductive rare earth-doped ZnO thin films prepared by magnetron sputtering

Thin Solid Films

Volumn 366, Issue 1-2, 2000, Pages 63-68

  Minami, Tadatsugu ^a   Yamamoto, Takashi ^a   Miyata, Toshihiro ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM PREPARATION; GLASS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; RARE EARTH ELEMENTS; SEMICONDUCTOR DOPING; THERMODYNAMIC STABILITY; ZINC OXIDE;

GLASS SUBSTRATE; SCANDIUM OXIDE; TRANSPARENT CONDUCTING OXIDE FILM;

THIN FILMS;

EID: 0034188667     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00731-8     Document Type: Article

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