Textured aluminium-doped ZnO thin films prepared by magnetron sputtering

Journal of Physics D: Applied Physics

Volumn 29, Issue 7, 1996, Pages 1873-1877

  Bose, Subhasis ^a   Ray, Swati ^a   Barua, A K ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CONDUCTIVE FILMS; CRYSTAL STRUCTURE; ELECTRIC PROPERTIES; FILM PREPARATION; MAGNETRON SPUTTERING; SEMICONDUCTOR DOPING; SILICON SOLAR CELLS; ZINC OXIDE;

FILM THICKNESS; HYDROGENATED AMORPHOUS SILICON SOLAR CELLS; TEXTURIZATION; ZINC OXIDE THIN FILMS;

THIN FILMS;

EID: 0030192126     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/7/022     Document Type: Article

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