Highly conducting transparent thin films based on zinc oxide

Journal of Materials Research

Volumn 11, Issue 7, 1996, Pages 1659-1664

  Wang, Ruiping ^a,b   King, Laura L H ^a,c   Sleight, Arthur W ^a  

^a OREGON STATE UNIVERSITY   (United States)

^b APPLIED MATERIALS INC   (United States)

^c Conductus ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC CONDUCTIVITY; ELECTRIC VARIABLES MEASUREMENT; HALL EFFECT; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; OPTICAL VARIABLES MEASUREMENT; SEMICONDUCTING ZINC COMPOUNDS; SEMICONDUCTOR DOPING;

BLUESHIFT; DOPANTS; HALL MEASUREMENT; HALL MOBILITY;

THIN FILMS;

EID: 0030190880     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1996.0208     Document Type: Article

References (26)

1. T. Minami, H. Sato, H. Nanto, and S. Takata, Jpn. J. Appl. Phys. 24, 10 (1985).
2. T. Minami, H. Sato, H. Nanto, and S. Takato, Jpn. J. Appl. Phys. 25, 9 (1986).
3. Z-C. Jin, I. Hamberg, and C. G. Granqvist, Appl. Phys. Lett. 51, 3 (1987).
4. T. Minami, H. Nanto, and S. Takato, Jpn. J. Appl. Phys. 23, 5 (1984).
5. R. E. I. Schropp and A. Madan, J. Appl. Phys. 66, 5 (1989).
6. T. Minami, H. Sato, K. Ohashi, T. Tomofuji, and S. Takata, J. Cryst. Growth 117, 370-374 (1992).
7. K. Kobayashi, T. Maeda, S. Matsushima, and G. Okada, J. Mater. Sci. 27, 5953 (1992).
8. R. Konishi, K. Noda, H. Harada, and H. Sasakura, J. Cryst Growth 117, 939 (1992).
9. M. J. Brett, R. R. Parsons, and H. P. Baltes, Appl. Opt. 25, 16 (1986).
10. T. Minami, H. Nanto, and S. Takata, Jpn. J. Appl. Phys. 24, 8 (1985).
11. A. Sarkar, S. Ghosh, S. Chaudhuri, and A. K. Pal, Thin Solid Films 204, 255 (1981).
12. A. P. Roth, J. B. Webb, and D. F. Williams, Phys. Rev. 25, 12 (1982).
13. W. W. Wenas, A. Yamada, M. Konagai, and K. Takahashi, Jpn. J. Appl. Phys. 30, 3B (1991).
14. A. P. Roth, J. B. Webb, and D. F. Williams, Solid State Commun. 39, 1269 (1981).
15. F. Noritake, N. Yamamoto, and Y. Horiguchi, J. Am. Ceram. Soc. 74, 1 (1991).
16. A. Tiburcio-Silver, J. C. Joubert, and M. Laveau, Thin Solid Films 197, 195 (1991).
17. B. H. Choi and H.B. Im, J. Am. Ceram. Soc. 73, 1347 (1990).
18. D. J. Goyal, C. Agashe, M. G. Takwale, V. Bhide, S. Mahamuni, and S. K. Kulkarni, J. Mater. Res. 8, 1052 (1993).
19. R. Wang, A. W. Sleight, and D. Cleary, Chem. Mater. 8, 433 (1996).
20. R. Wang and A. W. Sleight, unpublished.
21. I. Hamberg and C. G. Granqvist, Phys. Rev. B 30 (6), 3240-3249 (1984).
22. R. E. Dietz, J. J. Hopfield, and D. G. Thomas, J. Appl. Phys. 32, 2282 (1961).
23. P. A. Wolff, Phys. Rev. 126, 405 (1962).
24. D. Auvergne, J. Camassel, and H. Mathieu, Phys. Rev. B 11 (6), 2251-2259 (1975).
25. K. F. Berggren and B. E. Sernelius, Phys. Rev. B 24 (4), 1971-1986 (1981).
26. R. A. Abram, G. J. Rees, and B. L. H. Wilson, Adv. Phys. 27, 799 (1978).