TRIDYN simulation of target poisoning in reactive sputtering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 228, Issue 1-4 SPEC. ISS., 2005, Pages 193-197

  Rosen D ^a   Katardjiev, I ^a   Berg, S ^a   Moller W ^b  

^a UPPSALA UNIVERSITY   (Sweden)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY COLLISION APPROXIMATION (BCA); REACTIVE SPUTTERING; SURFACE BINDING ENERGY (SBE); TARGET POISIONING;

COMPUTER SIMULATION; CURVE FITTING; DEPOSITION; EROSION; FLUXES; ION BOMBARDMENT; ION IMPLANTATION; MAGNETRON SPUTTERING; PRESSURE EFFECTS;

TARGETS;

EID: 11344254056     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.10.044     Document Type: Conference Paper

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