A novel technique for the deposition of aluminium-doped zinc oxide films

Thin Solid Films

Volumn 426, Issue 1-2, 2003, Pages 111-116

  Kelly, P J ^a   Zhou, Y ^a   Postill, A ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Adhesion; Deposition process; Sputtering; Zinc oxide

Indexed keywords

ADHESION; ALUMINUM; ANNEALING; DEPOSITION; DOPING (ADDITIVES); HOT PRESSING; MAGNETRON SPUTTERING; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

CONDUCTIVE OXIDE COATINGS;

CONDUCTIVE FILMS;

EID: 0037463139     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01332-9     Document Type: Article

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