Preferred orientation and piezoelectricity in sputtered ZnO films

Journal of Applied Physics

Volumn 83, Issue 12, 1998, Pages 7844-7854

  Gardeniers, J G E ^a   Rittersma, Z M ^a,b   Burger, G J ^a,c  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UNIVERSITY OF BREMEN   (Germany)

^c Twente MicroProducts   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000590113     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367959     Document Type: Article

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