Arc handling considerations for DC sputtering DC power supplies

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2005, Pages 39-43

  Christie, D J ^a   Walde, H V ^a   Ash, T J ^a  

^a Advanced Energy Industries Incorporated   (United States)

Author keywords

Arc handling; DC sputtering; Fault detection; Pulsed DC sputtering

Indexed keywords

ARC HANDLING; DC SPUTTERING; FAULT DETECTION; PULSED-DC SPUTTERING;

ELECTRIC ARCS; ELECTRIC FAULT CURRENTS; MAINTENANCE; OXIDES; PHYSICAL VAPOR DEPOSITION; SPUTTERING;

ELECTRIC POWER SUPPLIES TO APPARATUS;

EID: 33644980515     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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