The effect of target aging on the structure formation of zinc oxide during reactive sputtering

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3554-3558

  Severin, D ^a   Kappertz, O ^b   Nyberg, T ^b   Berg, S ^b   Wuttig, M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b UPPSALA UNIVERSITY   (Sweden)

Author keywords

Negative oxygen ions; Reactive sputtering; Zinc oxide

Indexed keywords

FILM GROWTH; ION BOMBARDMENT; MOLECULAR STRUCTURE; NEGATIVE IONS; SPUTTER DEPOSITION; ZINC OXIDE;

CHARGED OXYGEN IONS; FILMS DEPOSITION; NEGATIVE OXYGEN IONS; REACTIVE SPUTTERING;

THIN FILMS;

EID: 33846903612     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.130     Document Type: Article

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