Piezoelectric properties of ZnO films on a sapphire substrate deposited by an RF-magnetron-mode ECR sputtering system

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 5 SUPPL. B, 1998, Pages 2923-2926

  Kadota, Michio ^a   Minakata, Makoto ^b  

^a MURATA MANUFACTURING CO LTD   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

ECR; Sapphire; SAW; Sezawa wave; Sputtering; ZnO

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ELECTRON CYCLOTRON RESONANCE; FILMS; FINITE ELEMENT METHOD; LATTICE CONSTANTS; SAPPHIRE; SUBSTRATES; X RAY DIFFRACTION;

ELECTROMECHANICAL COUPLING FACTORS; PIEZOELECTRIC PROPERTIES; SAPPHIRE SUBSTRATE; SEZAWA WAVE;

MAGNETRON SPUTTERING;

EID: 0032065828     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2923     Document Type: Article

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