Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering

Thin Solid Films

Volumn 442, Issue 1-2, 2003, Pages 179-183

  Szyszka, B ^a   Sittinger, V ^a   Jiang, X ^a   Hong, R J ^a   Werner, W ^a   Pflug, A ^a   Ruske, M ^b   Lopp, A ^b  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^b Applied Films GmbH and Co KG   (Germany)

Author keywords

Electrical properties and measurements; Optical coatings; Sputtering; Zinc oxide

Indexed keywords

ALUMINUM; CONDUCTIVE FILMS; DEPOSITION; ELECTRIC CONDUCTIVITY; GLASS; MAGNETRON SPUTTERING; SUBSTRATES; ZINC OXIDE;

SHEET RESISTANCE;

THIN FILMS;

EID: 0141525086     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00968-4     Document Type: Conference Paper

References (12)

1. J. Müller, G. Schöpe, O. Kluth, B. Rech, V. Sittinger, B. Szyszka, R. Geyer, P. Lechner, H. Schade, M. Ruske, G. Dittmar, State of the art MF sputtered ZnO films for thin film silicon solar cells and modules, this conference.
2. Coutts T.J., Mason T.O., Perkins J.D., Ginley D.S. Proc. Electrochem. Soc. 99-11:1999;274.
3. M. Bender, J. Trube, J. Stollenwerk, Proceedings of the SID 99, San Jose, 18-20 May, 1999, p. 841.
4. Granqvist G.C. Appl. Phys. A. 57:1993;19.
5. Jäger S., Szyszka B., Szczyrbowski J., Bräuer G. Surf. Coat. Technol. 98:1998;1304.
6. Szyszka B., Jäger S. J. Non-Cryst. Sol. 218:1997;74.
7. Szyszka B. Thin Solid Films. 351:1999;164.
8. B. Szyszka, Proceedings of the 43rd SVC Technical Conference, 2000, p. 187.
9. Malkomes N., Vergöhl M., Szyszka B. J. Vac. Sci. Technol. A. 19:2001;414.
10. B. Szyszka, T. Höing, X. Jiang, A. Pflug, N. Malkomes, M. Vergöhl, V. Sittinger, U. Bringmann, G. Bräuer, Proceedings of the 44th SVC Technical Conference, 2001, p. 272.
11. Tsuji N., Komiyama H., Tanaka K. Jpn. J. Appl. Phys. 9:1990;835.
12. A. Pflug, V. Sittinger, B. Szyszka, G. Dittmar, Modeling of NIR free carrier absorption in aluminum-doped zinc oxide layers using the simulation system RIG-VM, this conference.