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Volumn 1, Issue 8, 2014, Pages

A Chemical Route to Monolithic Integration of Crystalline Oxides on Semiconductors

Author keywords

atomic layer deposition; crystalline oxides; epitaxy; germanium; high k dielectrics

Indexed keywords

CHROMIUM COMPOUNDS; CRYSTALLINE MATERIALS; DIELECTRIC MATERIALS; EPITAXIAL GROWTH; GERMANIUM; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HIGH-K DIELECTRIC; LEAKAGE CURRENTS; MONOLITHIC INTEGRATED CIRCUITS; PEROVSKITE; POWER TRANSISTORS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; STRONTIUM TITANATES; SUBSTRATES; THICK FILMS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

EID: 84923077119     PISSN: None     EISSN: 21967350     Source Type: Journal    
DOI: 10.1002/admi.201400081     Document Type: Article
Times cited : (47)

References (60)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.