Tuning of material and electrical properties of strontium titanates using process chemistry and composition

ECS Transactions

Volumn 16, Issue 5, 2009, Pages 487-496

  Katamreddy, Rajesh ^a   Omarjee, Vincent ^a   Feist, Benjamin ^a   Dussarrat, Christian ^a   Singh, Manish ^b   Takoudis, Christos ^b,c  

^a AIR LIQUIDE   (France)

^b University of Illinois at Chicago   (United States)

^c UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC CHEMISTRY; CARBONATION; DIELECTRIC DEVICES; GATE DIELECTRICS; HIGH-K DIELECTRIC; OXIDE MINERALS; SPECTROSCOPIC ANALYSIS; STRONTIUM TITANATES; TITANIUM DIOXIDE;

ATMOSPHERIC EXPOSURES; CARBONATE FORMATIONS; CARBONATE GROUP; CARBONATE SPECIES; LOW MELTING POINT; PROCESS CHEMISTRY; STRONTIUM PRECURSOR; X-RAY PHOTOELECTRONS;

ATOMIC LAYER DEPOSITION;

EID: 63149115400     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2981630     Document Type: Conference Paper

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