SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 31, Issue 3, 2013, Pages

Preparation of a clean Ge(001) surface using oxygen plasma cleaning

(4) Ponath, Patrick a Posadas, Agham B a Hatch, Richard C a Demkov, Alexander A a

a UNIVERSITY OF TEXAS AT AUSTIN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING; OXYGEN; PHOTOELECTRONS; PLASMAS; WET ETCHING; X RAY PHOTOELECTRON SPECTROSCOPY;

ANGLE-RESOLVED PHOTOEMISSION; ATOMIC FORCE MICROSCOPE IMAGES; CARBON CONTAMINATION; GERMANIUM SURFACE; MEAN SURFACE ROUGHNESS; OXYGEN PLASMAS; PLASMA CLEANING; SITU X-RAY PHOTOELECTRON SPECTROSCOPY;

GERMANIUM;

EID: 84878367299 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.4798390 Document Type: Article

Times cited : (43)

References (20)

1
- 33646021568
- 10.1109/TED.2006.872362
- T. Krishnamohan, Z. Krivokapic, K. Uchida, Y. Nishi, and K. C. Saraswat, IEEE Trans. Electron Devices 53, 990 (2006). 10.1109/TED.2006.872362
- (2006) IEEE Trans. Electron Devices , vol.53 , pp. 990
- Krishnamohan, T.¹ Krivokapic, Z.² Uchida, K.³ Nishi, Y.⁴ Saraswat, K.C.⁵

2
- 33748551676
- 10.1147/rd.504.0377
- H. Shang, M. M. Frank, E. P. Gusev, J. O. Chu, S. W. Bedell, K. W. Guarini, and M. Ieong, IBM J. Res. Dev. 50, 377 (2006). 10.1147/rd.504.0377
- (2006) IBM J. Res. Dev. , vol.50 , pp. 377
- Shang, H.¹ Frank, M.M.² Gusev, E.P.³ Chu, J.O.⁴ Bedell, S.W.⁵ Guarini, K.W.⁶ Ieong, M.⁷

3
- 4444250961
- 10.1109/LED.2004.833842
- N. Wu, Q. Zhang, and C. Zhu, IEEE Electron Device Lett. 25, 631 (2004). 10.1109/LED.2004.833842
- (2004) IEEE Electron Device Lett. , vol.25 , pp. 631
- Wu, N.¹ Zhang, Q.² Zhu, C.³

4
- 0036687234
- 10.1109/LED.2002.801319
- C. O. Chui, S. Ramanathan, B. B. Triplett, P. C. McIntyre, and K. C. Saraswat, IEEE Electron Device Lett. 23, 473 (2002). 10.1109/LED.2002.801319
- (2002) IEEE Electron Device Lett. , vol.23 , pp. 473
- Chui, C.O.¹ Ramanathan, S.² Triplett, B.B.³ McIntyre, P.C.⁴ Saraswat, K.C.⁵

5
- 0035919629
- 10.1126/science.293.5529.468
- R. A. McKee, F. J. Walker, and M. F. Chisholm, Science 293, 468 (2001). 10.1126/science.293.5529.468
- (2001) Science , vol.293 , pp. 468
- McKee, R.A.¹ Walker, F.J.² Chisholm, M.F.³

6
- 34248652709
- 10.1016/j.mee.2007.04.036
- G. Mavrou, S. F. Galata, A. Sotiropoulos, P. Tsipas, Y. Panayiotatos, A. Dimoulas, E. K. Evangelou, J. W. Seo, and Ch. Dieker, Microelectron. Eng. 84, 2324 (2007). 10.1016/j.mee.2007.04.036
- (2007) Microelectron. Eng. , vol.84 , pp. 2324
- Mavrou, G.¹ Galata, S.F.² Sotiropoulos, A.³ Tsipas, P.⁴ Panayiotatos, Y.⁵ Dimoulas, A.⁶ Evangelou, E.K.⁷ Seo, J.W.⁸ Dieker, Ch.⁹

7
- 0032472187
- 10.1016/S0169-4332(97)00587-4
- H. Okumura, T. Akane, and S. Matsumoto, Appl. Surf. Sci. 125, 125 (1998). 10.1016/S0169-4332(97)00587-4
- (1998) Appl. Surf. Sci. , vol.125 , pp. 125
- Okumura, H.¹ Akane, T.² Matsumoto, S.³

8
- 33744612571
- 10.1116/1.578606
- X.-J. Zhang, G. Xue, A. Agarwal, R. Tsu, M.-A. Hasan, J. E. Greene, and A. Rockett, J. Vac. Sci. Technol. A 11, 2553 (1993). 10.1116/1.578606
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 2553
- Zhang, X.-J.¹ Xue, G.² Agarwal, A.³ Tsu, R.⁴ Hasan, M.-A.⁵ Greene, J.E.⁶ Rockett, A.⁷

9
- 0033208007
- 10.1016/S0039-6028(99)00866-3
- J. S. Hovis, R. J. Hamers, and C. M. Greenlief, Surf. Sci. Lett. 440, 815 (1999). 10.1016/S0039-6028(99)00866-3
- (1999) Surf. Sci. Lett. , vol.440 , pp. 815
- Hovis, J.S.¹ Hamers, R.J.² Greenlief, C.M.³

10
- 79952689657
- 10.1088/0957-4484/22/14/145604
- W. M. Kleese, G. Scappucci, G. Capellini, and M. Y. Simmons, Nanotechnology 22, 145604 (2011). 10.1088/0957-4484/22/14/145604
- (2011) Nanotechnology , vol.22 , pp. 145604
- Kleese, W.M.¹ Scappucci, G.² Capellini, G.³ Simmons, M.Y.⁴

11
- 0022699183
- 10.1149/1.2108651
- A. Ishizaka and Yasuhiro Shiraki, J. Electrochem. Soc. 133, 666 (1986). 10.1149/1.2108651
- (1986) J. Electrochem. Soc. , vol.133 , pp. 666
- Ishizaka, A.¹ Shiraki, Y.²

12
- 0041328123
- 10.1016/S0039-6028(03)00958-0
- D. Bodlaki, H. Yamamoto, D. H. Waldeck, and E. Borguet, Surf. Sci. 543, 63 (2003). 10.1016/S0039-6028(03)00958-0
- (2003) Surf. Sci. , vol.543 , pp. 63
- Bodlaki, D.¹ Yamamoto, H.² Waldeck, D.H.³ Borguet, E.⁴

13
- 33846942296
- 10.1149/1.2355913
- J. Kim, S. Liu, S. Tan, J. McVittie, K. Saraswat, and Y. Nishi, ECS Trans. 3, 1191 (2006). 10.1149/1.2355913
- (2006) ECS Trans. , vol.3 , pp. 1191
- Kim, J.¹ Liu, S.² Tan, S.³ McVittie, J.⁴ Saraswat, K.⁵ Nishi, Y.⁶

14
- 2442501598
- 10.1109/LED.2004.827285
- C. O. Chui, H. Kim, P. C. McIntyre, and K. C. Saraswat, IEEE Electron Device Lett. 25, 274 (2004). 10.1109/LED.2004.827285
- (2004) IEEE Electron Device Lett. , vol.25 , pp. 274
- Chui, C.O.¹ Kim, H.² McIntyre, P.C.³ Saraswat, K.C.⁴

15
- 0029409153
- 10.1016/0039-6028(95)00929-9
- D. E. Jones, J. P. Pelz, Y. H. Xie, P. J. Silverman, and E. A. Fitzgerald, Surf. Sci. Lett. 341, 1005 (1995). 10.1016/0039-6028(95)00929-9
- (1995) Surf. Sci. Lett. , vol.341 , pp. 1005
- Jones, D.E.¹ Pelz, J.P.² Xie, Y.H.³ Silverman, P.J.⁴ Fitzgerald, E.A.⁵

16
- 0035334336
- 10.1116/1.1367264
- L. H. Chan, E. I. Altman, and Y. Liang, J. Vac. Sci. Technol. 19, 976 (2001). 10.1116/1.1367264
- (2001) J. Vac. Sci. Technol. , vol.19 , pp. 976
- Chan, L.H.¹ Altman, E.I.² Liang, Y.³

17
- 0003459529
- (Physical electronics, Inc., Eden Prairie).
- J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-Ray Photoelectron Spectroscopy (Physical electronics, Inc., Eden Prairie, 1995).
- (1995) Handbook of X-Ray Photoelectron Spectroscopy
- Moulder, J.F.¹ Stickle, W.F.² Sobol, P.E.³ Bomben, K.D.⁴

18
- 84882896151
- (Elsevier, Boston).
- M. H. Engelhard, Handbook of Deposition Technologies for Films and Coatings (Elsevier, Boston, 2010).
- (2010) Handbook of Deposition Technologies for Films and Coatings
- Engelhard, M.H.¹

19
- 0001009463
- 10.1103/PhysRevB.36.5809
- S. D. Kevan and R. H. Gaylord, Phys. Rev. B 36, 5809 (1987). 10.1103/PhysRevB.36.5809
- (1987) Phys. Rev. B , vol.36 , pp. 5809
- Kevan, S.D.¹ Gaylord, R.H.²

20
- 0000407492
- 10.1103/PhysRevB.49.16523
- E. Landemark, C. J. Karlsson, L. S. O. Johansson, and R. I. G. Uhrberg, Phys. Rev. B 49, 16523 (1994). 10.1103/PhysRevB.49.16523
- (1994) Phys. Rev. B , vol.49 , pp. 16523
- Landemark, E.¹ Karlsson, C.J.² Johansson, L.S.O.³ Uhrberg, R.I.G.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.