Development of integrated heterostructures on silicon by MBE

Journal of Crystal Growth

Volumn 251, Issue 1-4, 2003, Pages 638-644

  Droopad, Ravi ^a   Yu, Zhiyi ^a   Li, Hao ^a   Liang, Yong ^a   Overgaard, Corey ^a   Demkov, Alex ^a   Zhang, Xiaodong ^a   Moore, Karen ^a   Eisenbeiser, Kurt ^a   Hu, Mike ^a   Curless, Jay ^a   Finder, Jeff ^a  

^a MOTOROLA INC   (United States)

Author keywords

A3. Molecular beam epitaxy; B1. Perovskites; B2. Dielectric materials

Indexed keywords

DEPOSITION; DIFFUSION IN GASES; HETEROJUNCTIONS; PARAMETER ESTIMATION; PHASE TRANSITIONS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; STOICHIOMETRY; SUBSTRATES; THIN FILMS;

EPITAXIAL OXIDES;

MOLECULAR BEAM EPITAXY;

EID: 0037382123     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)02200-5     Document Type: Conference Paper

References (14)

1. 2 and High-K Materials for ULSI Gate Dielectrics Symposium, 1999, p. 415.
2. Yu Z., Ramdani J., Curless J., Overgaard C., Finder J., Droopad R., Eisenbeiser K., Hallmark J., Ooms W., Kaushik V. J. Vac. Sci. Technol. B18:2000;2139.
3. Ishiwara H. Integr. Ferroelectrics. 17:1997;11.
4. Polla D.L., Francis L.F. MRS Bull. 21:1996;59.
5. Auciello O., Scott J.F., Ramesh R. Phys. Today. 51:1998;22.
6. Hu X., Yu Z., Curless J., Droopad R., Eisenbeiser K., Ewards J., Ooms W., Sarid D. Appl. Surf. Sci. 181:2001;103.
7. A. Demkov, unpublished.
8. H. Li, X. Hu, Y. Wei, J. Yu, X. Zhang, R. Droopad, A. Demkov, J. Edwards, K. Moore, W. Ooms, J. Kulik, P. Fejes, J. Appl. Phys., to be published.
9. Lattieri J., Heini J., Schlom D. J. Vac. Sci. Technol. A20:2002;1332.
10. Chambers S., Liang Y., Yu Z., Ramdani J., Eisenbeiser K. Appl. Phys. Lett. 77:2000;1662.
11. Eisenbeiser K., Finder J., Yu Z., Ramdani J., Curless J., Hallmark J., Droopad R., Ooms W., Salem L., Bradshaw S., Overgaard C. Appl. Phys. Lett. 76:2000;1324.
12. R. Droopad, J. Curless, Z. Yu, D. Jordan, Y. Liang, C. Overgaard, H. Li, T. Eschrich, J. Ramdani, L. Hilt, B. Craigo, K. Eisenbeiser, J. Kulik, P. Feyes, J. Finder, X. Hu, Y. Wei, J. Edwards, K. Moore, M. O'Steen, O. Baklenov, Proceedings of the International Symposium on Comp. Semi. 2002, to be published.
13. K. Eisenbeiser, R. Droopad, Z. Yu, C. Overgaard, J. Kulik, J. Finder, S. Smith, S. Voight, D. Penunuri, Proceedings of the International Conference on Alternative Substrate Technology, J. Elect. Mater. (2002), to be published.
14. Droopad R., Yu Z., Ramdani J., Hilt L., Curless J., Overgaard C., Edwards J., Finder J., Eisenbeiser K., Wang J., Kaushik V., Ngyuen B.-Y., Ooms B. J. Crystal Growth. 227-228:2001;936.