Heteroepitaxy of SrTiO3 thin films on Si (001) using different growth strategies: Toward substratelike quality

Journal of Vacuum Science and Technology B

Volumn 29, Issue 4, 2011, Pages

  Niu, G ^a   Vilquin, B ^a   Penuelas, J ^a   Botella, C ^a   Hollinger, G ^a   Saint Girons, G ^a  

^a ECOLE CENTRALE DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINITY; MOLECULAR BEAM EPITAXY; OXYGEN; PARTIAL PRESSURE; SILICON; STRONTIUM TITANATES; STRUCTURAL OPTIMIZATION; SURFACE ROUGHNESS; TEMPERATURE; TITANIUM COMPOUNDS;

AMORPHOUS INTERFACES; CRITICAL THICKNESS; INTERFACE SHARPNESS; LOW OXYGEN PARTIAL PRESSURE; OXIDIZING CONDITIONS; OXYGEN PARTIAL PRESSURE; PLASTIC RELAXATION; STRUCTURAL QUALITIES;

THIN FILMS;

EID: 80051890012     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3609813     Document Type: Article

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