Epitaxial integration of perovskite-based multifunctional oxides on silicon

Acta Materialia

Volumn 61, Issue 8, 2013, Pages 2734-2750

  Baek, Seung Hyub ^a   Eom, Chang Beom ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

Epitaxy; Oxides; Thin Films

Indexed keywords

FUNCTIONAL PROPERTIES; HIGH-CRYSTALLINE QUALITY; MULTIFUNCTIONAL DEVICES; MULTIFUNCTIONAL OXIDES; OXIDE HETEROSTRUCTURES; OXIDE MATERIALS; PEROVSKITE OXIDES; STRUCTURAL DEFECT;

DISSIMILAR MATERIALS; EPITAXIAL GROWTH; INTEGRATION; MATERIALS PROPERTIES; MOLECULAR BEAM EPITAXY; OXIDE FILMS; OXIDES; PEROVSKITE; THIN FILMS;

SILICON;

EID: 84875413510     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2012.09.073     Document Type: Article

References (96)

1. A.K. Sharma, J. Narayan, and C. Jin Appl Phys Lett 76 11 2000 1458 1460
2. Lee MB, Kawasaki M, Yoshimoto M, et al. Jpn J Appl Phys 1996;235(5A):L574-6.
3. N.A. Basit, H.K. Kim, and J. Blachere Appl Phys Lett 73 26 1998 3941 3943
4. Y. Wang, C. Ganpule, and B.T. Liu Appl Phys Lett 80 1 2002 97 99
5. Y.K. Wang, T.Y. Tseng, and P. Lin Appl Phys Lett 80 20 2002 3790 3792
6. B.T. Liu, K. Maki, and Y. So Appl Phys Lett 80 25 2002 4801 4803
7. B.K. Moon, H. Ishiwara, and E. Tokumitsu Thin Solid Films 385 1-2 2001 307 310
8. R.A. McKee, F.J. Walker, and M.F. Chisholm Phys Rev Lett 81 14 1998 3014 3017
9. A.M. Kolpak, F.J. Walker, and J.W. Reiner Phys Rev Lett 105 21 2010 217601
10. J.W. Reiner, A.M. Kolpak, and Y. Segal Adv Mater 22 26-27 2010 2919 2938
11. J. Lettieri, J.H. Haeni, and D.G. Scholm J Vac Sci Technol A 20 4 2002 1332 1340
12. Lettieri J. Critical issues of complex, epitaxial oxide growth and integration with silicon by molecular beam epitaxy. University Park: Pennsylvania State; 2002. University< http://etda.libraries.psu.edu/theses/ approved/WorldWideIndex/ETD-202/index.html >.
13. M.P. Warusawithana, C. Cen, and C.R. Sleasman Science 324 5925 2009 367 370
14. Y. Liang, Y. Wei, and X.M. Hu J Appl Phys 96 6 2004 3413 3416
15. J.W. Park, S.H. Baek, and C.W. Bark Appl Phys Lett 95 6 2009 061902
16. D. Su, T. Yamada, and V.O. Sherman J Appl Phys 101 6 2007 064102
17. C.M. Folkman, R.R. Das, and C.B. Eom Appl Phys Lett 89 22 2006 221904
18. C.B. Eom, R.J. Cava, and R.M. Fleming Science 258 5089 1992 1766 1769
19. Q.X. Jia, X.D. Wu, and S.R. Foltyn Appl Phys Lett 66 17 1995 2197 2199
20. C.B. Eom, J.Z. Sun, and K. Yamamoto Appl Phys Lett 55 6 1989 595 597
21. C.B. Eom, J.Z. Sun, and B.M. Lairson Physica C 171 3-4 1990 354 382
22. C.B. Eom, R.B. Vandover, and J.M. Phillips Appl Phys Lett 63 18 1993 2570 2572
23. H. Bea, M. Gajek, and M. Bibes J Phys: Condens Matter 20 43 2008 434221
24. G. Catalan, and J.F. Scott Adv Mater 21 21 2009 2463 2485
25. L.W. Martin, Y.H. Chu, and R. Ramesh Mater Sci Eng R 68 4-6 2010 III 133
26. L.W. Martin, and R. Ramesh Acta Mater 60 6-7 2012 2449 2470
27. T. Zhao, A. Scholl, and F. Zavaliche Nat Mater 5 10 2006 823 829
28. Y.H. Chu, L.W. Martin, and M.B. Holcomb Nat Mater 7 6 2008 478 482
29. D. Lebeugle, D. Colson, and A. Forget Phys Rev Lett 100 22 2008 227602
30. S. Lee, W. Ratcliff II, and S.W. Cheong Appl Phys Lett 92 19 2008 192906
31. S.K. Streiffer, C.B. Parker, and A.E. Romanov J Appl Phys 83 1998 2742
32. F. Zavaliche, R.R. Das, and D.M. Kim Appl Phys Lett 87 25 2005 252902
33. H.W. Jang, D. Ortiz, and S.H. Baek Adv Mater 21 2009 817
34. C.H. Yang, J. Seidel, and S.Y. Kim Nat Mater 8 6 2009 485 493
35. S. Farokhipoor, and B. Noheda Phys Rev Lett 107 12 2011 127601
36. J.W. Park, S.H. Baek, and P. Wu Appl Phys Lett 97 21 2010 212904
37. L.W. Martin, Y.H. Chu, and M.B. Holcomb Nano Lett 8 7 2008 2050 2055
38. Q. He, C.H. Yeh, and J.C. Yang Phys Rev Lett 108 6 2012 067203
39. Q. Gan, R.A. Rao, and C.B. Eom Appl Phys Lett 70 15 1997 1962 1964
40. J.C. Jiang, W. Tian, and X.Q. Pan Appl Phys Lett 72 23 1998 2963 2965
41. Y.H. Chu, M.P. Cruz, and C.H. Yang Adv Mater 19 18 2007 2662
42. S. Vilas, M. Dipanjan, and S. Gopalan Adv Mater 23 5 2011 669
43. D.D. Fong, A.M. Kolpak, and J.A. Eastman Phys Rev Lett 96 12 2006 127601
44. S.H. Baek, C.M. Folkman, and J.W. Park Adv Mater 23 14 2011 1621
45. S.H. Baek, H.W. Jang, and C.M. Folkman Nat Mater 9 4 2010 309 314
46. J. Wang, H. Zheng, and Z. Ma Appl Phys Lett 85 13 2004 2574 2576
47. R.R. Das, D.M. Kim, and S.H. Baek Appl Phys Lett 88 24 2006 242904
48. H.W. Jang, S.H. Baek, and D. Ortiz Appl Phys Lett 92 6 2008 062910
49. H.W. Jang, S.H. Baek, and D. Ortiz Phys Rev Lett 10 10 2008 107602
50. C. Lichtensteiger, J.M. Triscone, and J. Junquera Phys Rev Lett 94 4 2005 047603
51. D.D. Fong, C. Cionca, and Y. Yacoby Phys Rev B 71 14 2005 144112
52. J.B. Neaton, C.L. Hsueh, and K.N. Rabe Mater Res Soc Symp P 718 2002 311 316
53. C. Ederer, and N.A. Spaldin Phys Rev Lett 95 25 2005 257601
54. X.D. Qi, J. Dho, and R. Tomov Appl Phys Lett 86 6 2005 062903
55. K. Uchino Piezoelectric actuators and ultrasonic motors 1996 Kluwer Academic Boston, MA
56. J.W. Judy Smart Mater Struct 10 6 2001 1115
57. S. Trolier-McKinstry, and P. Muralt J Electroceram 12 1-2 2004 7 17
58. P. Muralt J Am Ceram Soc 91 5 2008 1385 1396
59. Muralt, P, Polcawich, R, Trolier-McKinstry, and S MRS Bull 34 9 2009 658 664
60. D. Isarakorn, A. Sambri, and P. Janphuang J Micromech Microeng 20 5 2010 055008
61. N.E. duToit, B.L. Wardle, and S.G. Kim Integr Ferroelectr 71 2005 121 160
62. K.A. Cook-Chennault, N. Thambi, and A.M. Sastry Smart Mater Struct 17 4 2008 043001
63. S.E. Park, and T.R. Shrout J Appl Phys 82 4 1997 1804 1811
64. S.E. Park, and T.R. Shrout IEEE Trans Ultrason Ferroelectr Freq Control 44 5 1997 1140 1147
65. S.H. Baek, J. Park, and D.M. Kim Science 334 6058 2011 958 961
66. R.G. Polcawich, and S. Trolier-McKinstry J Mater Res 15 11 2000 2505 2513
67. R.G. Polcawich, J.S. Pulskamp, and D. Judy IEEE T-MTT 55 12 2007 2642 2654
68. S.J. Zhang, S.M. Lee, and D.H. Kim Appl Phys Lett 93 12 2008 122908
69. S. Roundy J Intell Mater Syst Struct 16 10 2005 809 823
70. Kamel, TM, Elfrink, R, Renaud, and M J Micromech. Microeng. 20 10 2010 105023
71. M.A. Dubois, and P. Muralt IEEE Trans Ultrason Ferroelectr Freq Control 45 5 1998 1169 1177
72. M. Biegalski, K. Dorr, and D. Kim Appl Phys Lett 96 15 2010 151905
73. L. Pellegrino, M. Biasotti, and E. Bellingeri Adv Mater 21 23 2009 2377 2381
74. S. Okamoto, and A. Millis Nature 428 6983 2004 630 633
75. C. Cen, S. Thiel, and G. Hammerl Nat Mater 7 4 2008 298 302
76. A. Ohtomo, and H.Y. Hwang Nature 427 6973 2004 423 426
77. C. Cen, S. Thiel, and J. Mannhart Science 323 5917 2009 1026 1030
78. G. Herranz, M. Basletic, and M. Bibes Phys Rev Lett 98 21 2007 216803
79. K. Yoshimatsu, R. Yasuhara, and H. Kumigashira Phys Rev Lett 101 2 2008 026802
80. S. Thiel, G. Hammerl, and A. Schmehl Science 313 5795 2006 1942 1945
81. A.D. Caviglia, S. Gariglio, and N. Reyren Nature 456 7222 2008 624 627
82. N. Nakagawa, H.Y. Hwang, and D.A. Muller Nat Mater 5 3 2006 204 209
83. S. Thiel, C.W. Schneider, and L. Kourkoutis Phys Rev Lett 102 4 2009 046809
84. N. Reyren, S. Thiel, and A.D. Caviglia Science 317 5842 2007 1196 1199
85. M. Basletic, J.L. Maurice, and C. Carretero Nat Mater 7 8 2008 621 625
86. J. Lee, and A. Demkov Phys Rev B 78 19 2008 193104
87. Y. Hotta, T. Susaki, and H.Y. Hwang Phys Rev Lett 99 23 2007 236805
88. D.A. Dikin, M. Mehta, and C.W. Bark Phys Rev Lett 107 5 2011 056802
89. Lu Li, C. Richter, and J. Mannhart Nat Phys 7 10 2011 762 766
90. C.W. Bark, P. Sharma, and Y. Wang Nano Lett 12 4 2012 1765 1771
91. Y. Xie, Y. Hikita, and C. Bell Nat Commun 2 2011 494
92. P. Irvin, Y.J. Ma, and D.F. Bogorin Nat Photo 4 12 2010 849 852
93. C.W. Bark, D.A. Felker, and Y. Wang Proc Natl Acad Sci USA 108 12 2011 4720 4724
94. J.W. Park, D.F. Bogorin, and C. Cen Nat Commun 1 2010 94
95. J.H. Haeni, P. Irvin, and W. Chang Nature 430 7001 2004 758 761
96. H.W. Jang, A. Kumar, and S. Denev Phys Rev Lett 104 19 2010 197601