How to respond to process module failure in residency time-constrained single-arm cluster tools

IEEE Transactions on Semiconductor Manufacturing

Volumn 27, Issue 4, 2014, Pages 462-474

  Qiao, Yan ^a   Wu, Naiqi ^a,b   Pan, Chunrong ^c   Zhou, Mengchu ^b,d  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^c JIANGXI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cluster tools; Failure response; Petri net; Scheduling; Wafer fabrication

Indexed keywords

PETRI NETS; REAL TIME CONTROL; SCHEDULING;

CLUSTER TOOL; CYCLIC SCHEDULES; CYCLIC SCHEDULING; DYNAMIC BEHAVIORS; FAILURE RESPONSE; PETRI NET MODELS; TIME CONSTRAINTS; WAFER FABRICATIONS;

TOOLS;

EID: 84911111299     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2014.2340858     Document Type: Article

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