Online scheduling of integrated single-wafer processing tools with temporal constraints

IEEE Transactions on Semiconductor Manufacturing

Volumn 18, Issue 3, 2005, Pages 390-398

  Yoon, Hyun Joong ^a   Lee, Doo Yong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cluster tool; Online scheduling; Postprocessing residency constraint; Real time scheduling; Semiconductor manufacturing; Temporal constraint

Indexed keywords

ALGORITHMS; COMPUTATIONAL COMPLEXITY; CONSTRAINT THEORY; FORMAL LOGIC; MATHEMATICAL MODELS; POLYNOMIALS; SCHEDULING; SET THEORY; TIME DOMAIN ANALYSIS;

CLUSTER TOOLS; ONLINE SCHEDULING; POST PROCESSING RESIDENCY CONSTRAINTS; REAL-TIME SCHEDULING; SEMICONDUCTOR MANUFACTURING; TEMPORAL CONSTRAINTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 25144432280     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2005.852103     Document Type: Article

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