Petri net modeling and cycle-time analysis of dual-arm cluster tools with wafer revisiting

IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans

Volumn 43, Issue 1, 2013, Pages 196-207

  Wu, Naiqi ^a   Chu, Feng ^b   Chu, Chengbin ^c   Zhou, Mengchu ^d,e  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF EVRY   (France)

^c ECOLE CENTRALE PARIS   (France)

^d Department of Computer Science and Technology   (China)

^e NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cluster tool; Discrete event system; Petri nets (PNs); Scheduling; Semiconductor manufacturing.

Indexed keywords

CLUSTER TOOL; OPTIMALITY CONDITIONS; PETRI NET MODELS; PETRI NETS (PNS); SEMICONDUCTOR MANUFACTURING; SYSTEMATIC METHOD; TRANSIENT STATE; WAFER FABRICATIONS;

DISCRETE EVENT SIMULATION; INDUSTRIAL APPLICATIONS; PETRI NETS; SCHEDULING; TOOLS; SEMICONDUCTOR DEVICE MANUFACTURE;

SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

EID: 84887067395     PISSN: 10834427     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSMCA.2012.2187890     Document Type: Article

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