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IEEE Transactions on Robotics and Automation

Volumn 17, Issue 5, 2001, Pages 562-575

Timed Petri nets in modeling and analysis of cluster tools

a MEMORIAL UNIVERSITY OF NEWFOUNDLAND (Canada)

Author keywords

Cluster tools; Net transformations; Performance analysis; Place invariants; Steady state behavior; Structural analysis; Timed Petri nets; Transient behavior

Indexed keywords

MATHEMATICAL MODELS; MATRIX ALGEBRA; PERFORMANCE; PETRI NETS; RANDOM PROCESSES; ROBOTICS; SEMICONDUCTOR MATERIALS; VECTORS;

CLUSTER TOOLS; NET TRANSFORMATIONS; PLACE INVARIANTS; TIMED PETRI NETS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035485301 PISSN: 1042296X EISSN: None Source Type: Journal
DOI: 10.1109/70.964658 Document Type: Article

Times cited : (178)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.