A petri-net-based scheduling strategy for dual-arm cluster tools with wafer revisiting

IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans

Volumn 43, Issue 5, 2013, Pages 1182-1194

  Wu, Naiqi ^a   Zhou, Mengchu ^b,c   Chu, Feng ^d   Chu, Chengbin ^c,e  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^c TONGJI UNIVERSITY   (China)

^d UNIVERSITY OF EVRY   (France)

^e ECOLE CENTRALE PARIS   (France)

Author keywords

Cluster tool; Petri nets (PNs); Scheduling; Semiconductor manufacturing

Indexed keywords

CLUSTER TOOL; CYCLE TIME; DYNAMICAL BEHAVIORS; PETRI NETS (PNS); SCHEDULING METHODS; SCHEDULING STRATEGIES; SEMICONDUCTOR MANUFACTURING; WAFER FABRICATIONS;

PETRI NETS; SCHEDULING; TOOLS; SILICON WAFERS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84887074610     PISSN: 10834427     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSMCA.2012.2230440     Document Type: Article

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