An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints

IEEE Transactions on Robotics and Automation

Volumn 17, Issue 5, 2001, Pages 609-618

  Rostami, Shadi ^a   Hamidzadeh, Babak ^a   Camporese, Dan ^b  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

^b Brooks Automation (Canada)   (Canada)

Author keywords

Cluster tool; Residency constraint; Robotics; Scheduling; Semiconductor manufacturing

Indexed keywords

ALGORITHMS; COMPUTATIONAL COMPLEXITY; COST EFFECTIVENESS; HEURISTIC METHODS; NORMAL DISTRIBUTION; PROCESS CONTROL; ROBOTIC ARMS; ROBOTICS; SCHEDULING; THROUGHPUT;

CLUSTER TOOL; DUAL-ARM ROBOTS; RESIDENCY CONSTRAINT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035485501     PISSN: 1042296X     EISSN: None     Source Type: Journal    
DOI: 10.1109/70.964662     Document Type: Article

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