A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools with wafer residency time constraint based on steady schedule analysis

IEEE Transactions on Automation Science and Engineering

Volumn 7, Issue 2, 2010, Pages 303-315

  Wu, NaiQi ^a   Zhou, MengChu ^b,c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^c XIDIAN UNIVERSITY   (China)

Author keywords

Automated manufacturing system; Cluster tool; Petri nets (PNs); Scheduling; Semiconductor manufacturing

Indexed keywords

AUTOMATED MANUFACTURING SYSTEMS; CLOSED FORM SOLUTIONS; CLOSED-FORM EXPRESSION; CLUSTER TOOL; CYCLIC SCHEDULES; OPTIMAL SCHEDULING; PERIODIC SCHEDULE; PETRI NET MODELS; SCHEDULABILITY; SCHEDULING ANALYSIS; SEMICONDUCTOR MANUFACTURING; SUFFICIENT CONDITIONS; TIME CONSTRAINTS; TRANSIENT PROCESS;

DENSE WAVELENGTH DIVISION MULTIPLEXING; GRAPH THEORY; MANUFACTURE; OPTIMIZATION; PETRI NETS; PRODUCTION ENGINEERING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; TOOLS;

CLUSTERING ALGORITHMS;

EID: 77950864273     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2008.2008633     Document Type: Article

References (34)

1. M. Bader, R. Hall, and G. Strasser, "Integrated processing equipment," Solid State Technol., vol.33, pp. 149-154, 1990. (Pubitemid 20718631)
2. P. Burggraaf, "Coping with the high cost of wafer fabs," Semiconduct. Int., vol.38, pp. 45-50, 1995.
3. A. D. Che and C. B. Chu, "Multicyclic hoist scheduling with constant processing times," IEEE Trans. Robot. Autom., vol.18, no.1, pp. 69-80, 2002. (Pubitemid 34414687)
4. A. D. Che and C. B. Chu, "Cyclic hoist scheduling in large real-life electroplating lines," OR Spectrum, vol.29, no.3, pp. 445-470, 2007.
5. H. X. Chen, C. B. Chu, and J.-M. Proth, "Cyclic scheduling of a hoist with time window constraints," IEEE Trans. Robot. Autom., vol.14, pp. 291-318, 1998.
6. D. Jevtic, "Method and apparatus for priority based scheduling ofwafer processing within a multiple chamber semiconductor wafer processing tool," U.S. Patent 5 928 389, 1999.
7. V. Kats, E. Levner, and L. Mayzin, "Multiple-part cyclic hoist scheduling using a sieve method," IEEE Trans. Robot. Autom., vol.15, pp. 704-713, 1999.
8. J.-H. Kim, T.-E. Lee, H.-Y. Lee, and D.-B. Park, "Scheduling analysis of timed-constrained dual-armed cluster tools," IEEE Trans. Semicond. Manuf., vol.16, no.3, pp. 521-534, 2003.
9. T.-E. Lee and S.-H. Park, "An extended event graph with negative places and tokens for timed window constraints," IEEE Trans. Autom. Sci. Eng., vol.2, no.4, pp. 319-332, 2005. (Pubitemid 41560387)
10. Z. Li, H. Hu, and A. Wang, "Design of liveness-enforcing supervisors for flexible manufacturing systems using Petri nets," IEEE Trans. Syst., Man, Cybern., Part C: Appl. Rev., vol.37, no.4, pp. 517-526, July 2007. (Pubitemid 47061954)
11. Z. W. Li and M. C. Zhou, "Control of elementary and dependent siphons of Petri nets and their application," IEEE Trans. Syst., Man, Cybern., Part A: Syst. Human, vol.38, no.1, pp. 133-148, Jan. 2008.
12. D.-Y. Liao, M. D. Jeng, and M. C. Zhou, "Petri net modeling and Lagrangian relaxation approach to vehicle scheduling in 300 mm semiconductor manufacturing," in Proc. 2004 IEEE Conf. Robot. Autom., New Orleans, LA, 2004, pp. 5301-5306.
13. T. L. Perkinson, R. S. Gyurcsik, and P. K. MacLarty, "Single-wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitations sequences on throughput," IEEE Trans. Semicond. Manuf., vol.9, pp. 384-400, 1996.
14. T. L. Perkinson, P. K. MacLarty, R. S. Gyurcsik, and R. K. Cavin, "III, Single-wafer cluster tool performance: An analysis of throughput," IEEE Trans. Semicond. Manuf., vol.7, pp. 369-373, 1994.
15. S. Rostami, B. Hamidzadeh, and D. Camporese, "An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints," IEEE Trans. Robot. Autom., vol.17, pp. 609-618, 2001. (Pubitemid 33137777)
16. Y.-H. Shin, T.-E. Lee, J.-H. Kim, and H.-Y. Lee, "Modeling and implementing a real-time scheduler for dual-armed cluster tools," Comput. in Industry, vol.45, no.1, pp. 13-27, 2001.
17. Q. Su and F. F. Chen, "Optimal sequencing of double-gripper gantry robot moves in tightly-coupled serial production systems," IEEE Trans. Robot. Autom., vol.12, pp. 22-30, 1996. (Pubitemid 126780445)
18. S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, "A steady state throughput analysis of cluster tools: Dual-blade versus singleblade robots," IEEE Trans. Semiconduct. Manuf., vol.10, pp. 418-424, 1997. (Pubitemid 127763010)
19. S. C. Wood, "Simple performance models for integrated processing tools," IEEE Trans. Semicond. Manuf., vol.9, pp. 320-328, 1996. (Pubitemid 126776264)
20. N. Q. Wu, "Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model," IEEE Trans. Syst., Man, Cybern., Part C., vol.29, no.2, pp. 192-204, 1999.
21. N. Q. Wu, C. B. Chu, F. Chu, and M. C. Zhou, "A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints," IEEE Trans. Semicond. Manuf., vol.21, no.2, pp. 224-237, 2008. (Pubitemid 351695248)
22. N. Q. Wu and M. C. Zhou, "Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems," IEEE Trans. Robot. Autom., vol.17, no.5, pp. 657-668, 2001.
23. N. Q. Wu and M. C. Zhou, "Modeling and deadlock control of automated guided vehicle systems," IEEE/ASME Trans. Mechatronics, vol.9, no.1, pp. 50-57, 2004.
24. N. Q. Wu and M. C. Zhou, "Modeling and deadlock avoidance of automated manufacturing systems with multiple automated guided vehicles," IEEE Trans. Syst., Man, Cybern., Part B., vol.35, no.6, pp. 1193-1202, 2005. (Pubitemid 41800419)
25. N. Q.Wu and M. C. Zhou, "Deadlock avoidance in semiconductor track systems," in Proc. 2002 IEEE Int. Conf. Robot. Autom., Washington, D.C., May 2002, pp. 193-198.
26. M. Zhou and F. DiCesare, "Parallel and sequential mutual exclusions for Petri net modeling of manufacturing systems with shared resources," IEEE Trans. Robot. Autom., vol.7, no.4, pp. 515-527, 1991. (Pubitemid 21674694)
27. M. Zhou, F. DiCesare, and A. Desrochers, "A hybrid methodology for synthesis of Petri nets for manufacturing systems," IEEE Trans. Robot. Autom., vol.8, pp. 350-361, 1992.
28. M. C. Zhou and M. D. Jeng, "Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems:APetri net approach," IEEE Trans. Semicond. Manuf., vol.11, no.3, pp. 333-357, 1998.
29. M. C. Zhou and K. Venkatesh, Modeling, Simulation and Control of Flexible Manufacturing Systems: Petri Net Approach. Singapore: World Scientific, 1998.
30. W. M. Zuberek, "Timed Petri nets in modeling and analysis of cluster tools," IEEE Trans. Robot. Autom., vol.17, no.5, pp. 562-575, 2001. (Pubitemid 33137773)
31. N. Q. Wu and M. C. Zhou, "Deadlock modeling and control of semiconductor track systems using resource-oriented Petri nets," Int. J. Prod. Res., vol.45, no.15, pp. 3439-3456, 2007. (Pubitemid 46907031)
32. J.-H. Kim and T.-E. Lee, "Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended Petri net," IEEE Trans. Autom. Sci. Eng., vol.5, no.3, pp. 490-503, Oct. 2008.
33. J. S. Lee, M. C. Zhou, and P. L. Hsu , "A Petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems," IEEE Trans. Autom. Sci. Eng., vol.4, no.4, pp. 584-588, Oct 2007.
34. J. S. Lee, M. C. Zhou, and P. L. Hsu , "Multi-paradigm modeling for hybrid dynamic systems using Petri net framework," IEEE Trans. Syst., Man, Cybern.: Part A, vol.38, no.2, pp. 493-498, Mar. 2008.