Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation

IEEE Transactions on Automation Science and Engineering

Volumn 9, Issue 3, 2012, Pages 564-577

  Qiao, Yan ^a   Wu, NaiQi ^a   Zhou, MengChu ^b,c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b Ministry of Education   (China)

^c NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cluster tools; discrete event system; Petri net (PN); scheduling; semiconductor manufacturing

Indexed keywords

ACTIVITY TIME; CLUSTER TOOL; CYCLE TIME; ILLUSTRATIVE EXAMPLES; NORMAL CONDITION; PETRI NET MODELS; REAL TIME SCHEDULES; REAL TIME SCHEDULING; SCHEDULABILITY CONDITIONS; SEMICONDUCTOR MANUFACTURING; TIME CONSTRAINTS;

DISCRETE EVENT SIMULATION; PETRI NETS; REAL TIME CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

SCHEDULING;

EID: 84863456306     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2012.2192476     Document Type: Article

References (49)

1. N. Brauner, "Identical part production in cyclic robotic cells: Concepts, overview and open questions," Discrete Appl. Math., vol. 156, pp. 2480-2492, 2008.
2. W. K. V. Chan, J. Yi, and S. Ding, "Optimal scheduling of multicluster tools with constant robot moving times, part I: Two-cluster analysis," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 5-16, Jan. 2011.
3. M. Dawande, C. Sriskandarajah, and C. S. Sethi, "On throughput maximization in constant travel-time robotic cells," Manuf. Service Oper. Manage., vol. 4, no. 4, pp. 296-312, 2002.
4. S. Ding, J. Yi, and M. Zhang, "Scheduling multi-cluster tools: An integrated event graph and network model approach," IEEE Trans. Semicond. Manuf., vol. 19, no. 3, pp. 339-351, Aug. 2006.
5. D. Jevtic, "Method and apparatus for priority based scheduling ofwafer processing within a multiple chamber semiconductor wafer processing tool," U.S. Patent 5,928,389, 1999.
6. J.-H. Kim, T.-E. Lee, H.-Y. Lee, and D.-B. Park, "Scheduling analysis of timed-constrained dual-armed cluster tools," IEEE Trans. Semicond. Manuf., vol. 16, no. 3, pp. 521-534, Aug. 2003.
7. J.-H. Kim and T.-E. Lee, "Schedulability analysis of timed-constrained cluster tools with bounded time variation by an extended Petri net," IEEE Trans. Autom. Sci. Eng., vol. 5, no. 3, pp. 490-503, Jul. 2008.
8. T.-E. Lee, H.-Y. Lee, and Y.-H. Shin, "Workload balancing and scheduling of a single-armed cluster tool," in Proc. 5th APIEMS Conf., Gold Coast, Australia, 2004, pp. 1-15.
9. T.-E. Lee and S.-H. Park, "An extended event graph with negative places and tokens for timed window constraints," IEEE Trans. Autom. Sci. Eng., vol. 2, no. 4, pp. 319-332, Oct. 2005.
10. Z. W. Li and M. C. Zhou, Deadlock Resolution in Automated Manufacturing Systems: A Novel Petri Net Approach. New York: Springer, 2009.
11. M.-J. Lopez and S.-C.Wood, "Systems of multiple cluster tools-Configuration, reliability, and performance," IEEE Trans. Semicond. Manuf., vol. 16, no. 2, pp. 170-178, May 2003.
12. T. L. Perkinson, P. K. MacLarty, R. S. Gyurcsik, and R. K. Cavin, III, "Single-wafer cluster tool performance: An analysis of throughput," IEEE Trans. Semicond. Manuf., vol. 7, no. 3, pp. 369-373, Aug. 1994.
13. T. L. Perkinson, R. S. Gyurcsik, and P. K. MacLarty, "Single-wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitations sequences on throughput," IEEE Trans. Semicond. Manuf., vol. 9, no. 3, pp. 384-400, Aug. 1996.
14. Y. Qiao, N. Q.Wu, and M. C. Zhou, "Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time constraint and activity time variation," Working Paper, School of Mechatronic Eng., Guangdong Univ. Tech., Sept. 2011. [Online]. Available: http://web.njit.edu/ ~zhou/qiao-wu-zhou2011.pdf
15. S. Rostami, B. Hamidzadeh, and D. Camporese, "An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 609-618, Oct. 2001.
16. Y.-H. Shin, T.-E. Lee, J.-H. Kim, and H.-Y. Lee, "Modeling and implementing a real-time scheduler for dual-armed cluster tools," Comput. Industry, vol. 45, no. 1, pp. 13-27, 2001.
17. S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, "A steady state throughput analysis of cluster tools: Dual-blade versus single-blade robots," IEEE Trans. Semicond. Manuf., vol. 10, no. 4, pp. 418-424, Nov. 1997.
18. N. Q. Wu, "Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model," IEEE Trans. Syst., Man, Cybern., Part C, vol. 29, no. 2, pp. 192-204, May 1999.
19. N. Q. Wu, C. B. Chu, F. Chu, and M. C. Zhou, "A petri net method for schedulability and scheduling problems in single-arm cluster tools withwafer residency time constraints," IEEE Trans. Semicond. Manuf., vol. 21, no. 2, pp. 224-237, May 2008.
20. N. Q. Wu, F. Chu, C. B. Chu, and M. C. Zhou, "Petri net-based scheduling of single-arm cluster tools with reentrant atomic layer deposition processes," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 42-55, Jan. 2011.
21. N. Q. Wu, C. B. Chu, F. Chu, and M. C. Zhou, "Petri net modeling and cycle time analysis of dual-arm cluster tools with wafer revisiting," IEEE Trans. Syste., Man, Cybernet., Part A, 2012, 10.1109/TSMCA. 2012.2187890.
22. N. Q.Wu and M. C. Zhou, "Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems based on a Petri net model," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 658-669, 2001.
23. N. Q. Wu, M. C. Zhou, S. S. Peng, F. Chu, and C. B. Chu, "Petri net modeling and real-time control of dual-arm cluster tools with residency time constraint and activity time variations," in Proc. 4th IEEE Conf. Autom. Sci. Eng., Washington DC, Aug. 23-26, 2008, pp. 109-114.
24. N. Q. Wu and M. C. Zhou, System Modeling and Control With Resource-Oriented Petri Nets. Boca Raton, FL: CRC Press, Oct. 2009.
25. N. Q. Wu and M. C. Zhou, "A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools with wafer residency time constraint based on steady schedule analysis," IEEE Trans. Autom. Sci. Eng., vol. 7, no. 2, pp. 303-315, Apr. 2010.
26. N. Q.Wu and M. C. Zhou, "Colored timed Petri nets for modeling and analysis of cluster tools," Asian J. Control, vol. 12, no. 3, pp. 253-266, 2010.
27. N. Q.Wu and M. C. Zhou, "Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 2, pp. 446-454, Apr. 2012.
28. N. Q.Wu and M. C. Zhou, "Schedulability analysis and optimal scheduling of dual-arm cluster tools with residency time constraint and activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 1, pp. 203-209, Jan. 2012.
29. J. Yi, S. Ding, and M. Zhang, "Steady-state throughput and scheduling analysis of multi-cluster tools: A decomposition approach," IEEE Trans. Autom. Sci. Eng., vol. 5, no. 2, pp. 321-336, Apr. 2008.
30. H. J. Yoon and D. Y. Lee, "On-line scheduling of integrated singlewafer processing tools with temporal constraints," IEEE Trans. Semicond. Manuf., vol. 18, no. 3, pp. 390-398, Aug. 2005.
31. M. C. Zhou and F. DiCesare, Petri Net Synthesis for Discrete Event Control of Manufacturing Systems. London, U.K.: Kluwer, 1993.
32. M. C. Zhou and K. Venkatesh, Modeling, Simulation and Control of Flexible Manufacturing Systems: Petri Net Approach. Singapore: World Scientific, 1998.
33. M. C. Zhou and M. D. Jeng, "Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems:APetri net approach," Trans. Semiconductor Manuf., vol. 11, no. 3, pp. 333-357, 1998.
34. W. M. Zuberek, "Timed Petri nets in modeling and analysis of cluster tools," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 562-575, Oct. 2001.
35. R. Zurawski and M. C. Zhou, "Petri nets and industrial applications: A tutorial,," EEE Trans. Ind. Electron., vol. 41, no. 6, pp. 567-583, Dec. 1994.
36. H. Hu, M. C. Zhou, and Z. Li, "Liveness and ratio-enforcing supervision of automated manufacturing systems using Petri nets," Trans. Syst., Man, Cybern.-Part A: Syst. Humans,, vol. 42, no. 2, pp. 392-403, Mar. 2012.
37. Y.-S. Huang, Y.-L. Pan, and M. C. Zhou, "Computationally improved optimal deadlock control policy for flexible manufacturing systems," IEEE Trans. Syst., Man, Cybern.-Part A: Syst. Humans, vol. 42, no. 2, pp. 404-415, Mar. 2012.
38. J. S. Lee, M. C. Zhou, and P. L. Hsu, "A Petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems," IEEE Trans. Autom. Sci. Eng., vol. 4, no. 4, pp. 584-588, Oct. 2007.
39. D.-Y. Liao, M. D. Jeng, and M. C. Zhou, "Petri net modeling and Lagrangian relaxation approach to vehicle scheduling in 300 mm semiconductor manufacturing," IEEE Trans. Syst., Man, Cybern.-Part C, vol. 37, no. 4, pp. 504-416, Jul. 2007.
40. F. Qiao, X. H. Xu, M. Fang, and Q. D. Wu, "Performance evaluation system for scheduling semiconductor wafer product line," J. Tongji University, vol. 35, no. 4, pp. 537-542, 2007.
41. R. Qiu and M. C. Zhou, "Mighty MESs: State-of-the-art and future manufacturing execution systems," IEEE Robot. Autom. Mag., pp. 19-25 and 40, Mar. 2004.
42. Y. Tang, M. C. Zhou, and R Qiu, "Virtual production line design for back-end semiconductor manufacturing systems," IEEE Trans. Semiconductor Manuf., vol. 16, no. 3, pp. 543-550, Aug. 2003.
43. Y. Tang and M. C. Zhou, "A queueing network-based method for reconfiguration of back-end semiconductor manufacturing systems with unreliable equipment," Int. J. Intell. Control Syst., vol. 11, no. 2, pp. 105-112, Jun. 2006.
44. Y. Tang and M. C. Zhou, "A systematic approach to design and operation of disassembly lines," IEEE Trans. Autom Sci. Eng., vol. 3, no. 3, pp. 324-329, Jul. 2006.
45. Z. T. Wang, Q. D. Wu, and F. Qiao, "A job dispatching strategy integrating WIP management and wafer start control," IEEE Trans. Autom Sci. Eng., vol. 4, no. 4, pp. 579-583, Oct. 2007.
46. N. Q. Wu and M. C. Zhou, "Intelligent token Petri nets for modeling and control of reconfigurable automated manufacturing systems with dynamical changes," Trans. Inst. Meas. Control, vol. 33, no. 1, pp. 9-29, Feb. 2011.
47. H. H. Xiong and M. C. Zhou, "Scheduling of semiconductor test facility via Petri nets and hybrid heuristic search," IEEE Trans. Semiconductor Manuf., vol. 11, no. 3, pp. 384-393, Aug. 1998.
48. Y. Yin, M. Liu, J. Hao, and M. C. Zhou, "Single machine scheduling with job position-dependent learning and time-dependent deterioration," IEEE Trans. Syst., Man, Cybern.-Part A: Syst. Humans, vol. 42, no. 1, pp. 192-200, Jan. 2012.
49. H. Zhu and M. C. Zhou, "Efficient role transfer based on Kuhn-Munkres algorithm," IEEE Trans. Syst., Man, Cybern.-Part A: Syst. Humans, vol. 42, no. 2, pp. 491-496, Mar. 2012.