Modeling and implementing a real-time scheduler for dual-armed cluster tools

Computers in Industry

Volumn 45, Issue 1, 2001, Pages 13-27

  Shin, Yong Ho ^a   Lee, Tae Eog ^a   Kim, Ja Hee ^a   Lee, Hwan Yong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cluster tool; Finite state machine; Model; Scheduling

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FINITE AUTOMATA; MATHEMATICAL MODELS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SEQUENTIAL MACHINES; SILICON WAFERS;

FINITE STATE MACHINES (FSM);

REAL TIME SYSTEMS;

EID: 0035334186     PISSN: 01663615     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0166-3615(01)00078-1     Document Type: Article

References (21)

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