Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach

IEEE Transactions on Semiconductor Manufacturing

Volumn 11, Issue 3, 1998, Pages 333-357

  Zhou, MengChu ^a,c   Jeng, Mu Der ^b,c  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^b NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^c IEEE   (United States)

Author keywords

Automation; Discrete event systems; Performance evaluation; Petri nets; Qualitative analysis; Quantitative analysis; Reduction; Scheduling; Semiconductor manufacturing; System modeling and simulation

Indexed keywords

COMPUTER SIMULATION; DISCRETE TIME CONTROL SYSTEMS; FACTORY AUTOMATION; PETRI NETS; PRODUCTION CONTROL; SEMICONDUCTOR DEVICE MODELS;

QUALITATIVE ANALYSIS; QUANTITATIVE ANALYSIS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032141060     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.705370     Document Type: Article

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