Scheduling of dual-arm cluster tools with wafer revisiting and residency time constraints

IEEE Transactions on Industrial Informatics

Volumn 10, Issue 1, 2014, Pages 286-300

  Qiao, Yan ^a   Wu, Naiqi ^b,c   Zhou, Meng Chu ^c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^c NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cluster tools; Petri net; scheduling; semiconductor manufacturing

Indexed keywords

ATOMIC LAYER DEPOSITION; PETRI NETS; SCHEDULING; TOOLS;

ANALYTICAL EXPRESSIONS; CLUSTER TOOL; CYCLIC SCHEDULES; CYCLIC SCHEDULING; SCHEDULABILITY CONDITIONS; SCHEDULING PROBLEM; SEMICONDUCTOR MANUFACTURING; TIME CONSTRAINTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84898440364     PISSN: 15513203     EISSN: None     Source Type: Journal    
DOI: 10.1109/TII.2013.2272702     Document Type: Article

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