Optimal scheduling of multicluster tools with constant robot moving times, part I: Two-cluster analysis

IEEE Transactions on Automation Science and Engineering

Volumn 8, Issue 1, 2011, Pages 5-16

  Chan, Wai Kin Victor ^a   Yi, Jingang ^b   Ding, Shengwei ^c  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b RUTGERS UNIVERSITY   (United States)

^c NESTLÉ RESEARCH CENTER   (Switzerland)

Author keywords

Cluster tools; multiple machines; performance productivity; scheduling; semiconductor manufacturing

Indexed keywords

CLOSED-FORM EXPRESSION; CLUSTER TOOL; CYCLE TIME; MULTIPLE MACHINE; OPTIMAL SCHEDULE; OPTIMAL SCHEDULING; PERFORMANCE/PRODUCTIVITY; POLYNOMIAL-TIME; PRODUCTIVITY IMPROVEMENTS; SEMICONDUCTOR MANUFACTURING;

CLUSTER ANALYSIS; COST REDUCTION; MANUFACTURE; OPTIMIZATION; POLYNOMIAL APPROXIMATION; PRODUCTIVITY; ROBOTS;

TOOLS;

EID: 78651098378     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2010.2046891     Document Type: Article

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