Steady-state throughput and scheduling analysis of multicluster tools: A decomposition approach

IEEE Transactions on Automation Science and Engineering

Volumn 5, Issue 2, 2008, Pages 321-336

  Yi, Jingang ^a,b   Ding, Shengwei ^c   Song, Dezhen ^a,d   Zhang, Mike Tao ^a,e,f  

^a IEEE

^b UTC Aerospace Systems   (United States)

^c DEPARTMENT OF INDUSTRIAL ENGINEERING AND OPERATIONS RESEARCH   (United States)

^d TEXAS A AND M UNIVERSITY   (United States)

^e INTEL CORPORATION   (United States)

^f Submicron Development Center   (United States)

Author keywords

Cluster tool; Decomposition; Scheduling; Semiconductor manufacturing; Throughput

Indexed keywords

CHEMICAL VAPOR DEPOSITION; PROBLEM SOLVING; ROBOTS; SCHEDULING ALGORITHMS; SEMICONDUCTOR MATERIALS;

CLUSTER TOOLS; SEMICONDUCTOR MANUFACTURING;

SCHEDULING;

EID: 41949134365     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2007.906678     Document Type: Article

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