Scheduling cluster tools with ready time constraints for consecutive small lots

IEEE Transactions on Automation Science and Engineering

Volumn 10, Issue 1, 2013, Pages 145-159

  Kim, Hyun Jung ^a   Lee, Jun Ho ^a   Jung, Chihyun ^b   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b IBM MICROELECTRONICS   (United States)

Author keywords

Cluster tool; noncyclic scheduling; Petri net; ready time constraints; small lot production

Indexed keywords

300 MM WAFERS; APPROXIMATION METHODS; BRANCH AND BOUNDS; CLUSTER TOOL; CYCLIC SCHEDULING; CYCLIC SEQUENCES; DISCRETE EVENT DYNAMIC SYSTEMS; LOT SIZE; MAKESPAN; MATHEMATICAL METHOD; MIXED INTEGER PROGRAMMING MODEL; OPTIMAL SCHEDULE; PETRI NET MODELS; PROCESS STEPS; SCHEDULING PROBLEM; SEMICONDUCTOR MANUFACTURING INDUSTRY; TIME CONSTRAINTS; WORK CYCLE;

APPROXIMATION THEORY; DISCRETE EVENT SIMULATION; LINEAR PROGRAMMING; OPTIMIZATION; PETRI NETS; PROBLEM SOLVING; SCHEDULING ALGORITHMS; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

SCHEDULING;

EID: 84871811802     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2012.2220355     Document Type: Article

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