Multicluster tools scheduling: An integrated event graph and network model approach

IEEE Transactions on Semiconductor Manufacturing

Volumn 19, Issue 3, 2006, Pages 339-351

  Ding, Shengwei ^b   Yi, Jingang ^a,c   Zhang, Mike Tao ^a,d  

^a IEEE

^b DEPARTMENT OF INDUSTRIAL ENGINEERING AND OPERATIONS RESEARCH   (United States)

^c Texas AandM University   (United States)

^d INTEL CORPORATION   (United States)

Author keywords

Cluster tool; Event graph; Network; Scheduling; Semiconductor manufacturing

Indexed keywords

DECISION THEORY; GRAPH THEORY; INTEGRATED CIRCUIT LAYOUT; MATHEMATICAL MODELS; OPTIMIZATION; SCHEDULING;

CLUSTER TOOL; EVENT GRAPH; NETWORKS; SEMICONDUCTOR MANUFACTURING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 33747443542     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2006.879414     Document Type: Article

References (25)

1. Y. Crama and J. van de Klundert, "Cyclic scheduling of identical parts in a robotic cell," Oper. Res., vol. 45, no. 6, pp. 952-965, 1997.
2. M. Dawande, C. Sriskandarajah, and S. Sethi, "On throughtput maximization in constant travel-time robotic cells," Manuf. Service Oper. Manage., vol. 4, no. 4, pp. 296-312, 2002.
3. I. Drobouchevitch, S. Sethi, and C. Sriskandarajah, "Scheduling dual gripper robotic cells: One-unit cycles," Eur. J. Oper. Res., vol. 171, no. 2, pp. 598-631, 2006.
4. T. Perkinson, P. McLarty, R. Gyurcsik, and R. Cavin, "Single-wafer cluster tool performance: An analysis of throughput," IEEE Trans. Semiconduct. Manufact., vol. 7, no. 3, pp. 369-373, Aug. 1994.
5. S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, "A steady-state throughput analysis of cluster tools: Dual-blade versus single-blade robots," IEEE Trans. Semiconduct. Manufact., vol. 10, no. 4, pp. 418-424, Nov. 1997.
6. T. Perkinson, R. Gyurcsik, and P. McLarty, "Single-wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitation sequences on throughput," IEEE Trans. Semiconduct. Manufact., vol. 9, no. 3, pp. 384-400, Aug. 1996.
7. R. Srinivasan, "Modeling and performance analysis of cluster tools using Petri nets," IEEE Trans. Semiconduct. Manufact., vol. 11, no. 3, pp. 394-403, Aug. 1998.
8. W. Zuberek, "Timed Petri nets in modeling and analysis of cluster tools," IEEE Trans. Robot. Automat., vol. 17, no. 5, pp. 562-575, Oct. 2001.
9. S. Rostami, B. Hamidzadeh, and D. Camporese, "An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints," IEEE Trans. Robot. Automat., vol. 17, no. 5, pp. 609-618, Oct. 2001.
10. S. Rostami and B. Hamidzadeh, "Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints," IEEE Trans. Semiconduct. Manufact., vol. 15, no. 3, pp. 341-349, Aug. 2002.
11. H. T. LeBaron and R. A. Hendrickson, "Using emulation to validate a cluster tool simulation model," in Proc. 2000 Winter Simulation Conf., Orlando, FL, 2000, pp. 1417-1422.
12. H. T. LeBaron and M. Pool, "The simulation of cluster tools: A new semiconductor manufacturing technology," in Proc. 1994 Winter Simulation Conf., Orlando, FL, 1994, pp. 907-912.
13. M. A. Dümmler, "Using simulation and genetic algorithms to improve cluster tool performance," in Proc. 1999 Winter Simulation Conf., Phoenix, AZ, 1999, pp. 875-879.
14. D. A. Nehme and N. G. Pierce, "Evaluation the throughput of cluster tools using event-graph simulations," in Proc. 1994 IEEE/SEMI Adv. Semiconduct. Manufact. Conf., Cambridge, MA, 1994, pp. 189-192.
15. D. Pederson and C. Trout, "Demonstrated benefits of cluster tool simulation," in Proc. 2002 Int. Conf. Modeling Analysis Semiconduct. Manufact., Tempe, AZ, 2002, pp. 84-89.
16. S. Ding and J. Yi, "An event graph based simulation and scheduling analysis of multicluster tools," in Proc. 2004 Winter Simulation Conf., Washington, DC, 2004, pp. 1915-1924.
17. J. Herrmann, N. Chandrasekaran, B. Conaghan, M. Nguyen, G. Rubloff, and R. Zhi, "Evaluating the impact of process changes on cluster tool performance," IEEE Trans. Semiconduct. Manufact., vol. 13, no. 2, pp. 181-192, May 2000.
18. J. Yi, S. Ding, and D. Song, "Steady-state throughput and scheduling analysis of multicluster tools for semiconductor manufacturing: A decomposition approach," in Proc. IEEE Int. Conf. Robot. Automat., Barcelona, Spain, 2005, pp. 293-299.
19. N. Geismar, C. Sriskandarajah, and N. Ramanan, "Increasing throughput for robotic cells with parallel machines and multiple robots," IEEE Trans. Automat. Sci. Eng., vol. 1, no. 1, pp. 84-89, Jan. 2004.
20. L. Schruben, "Simulation modeling with event graphs," Commun. ACM, vol. 26, no. 11, pp. 957-963, 1983.
21. J. Kelley, Jr., "Critical-path planning and scheduling: Mathematical basis," Oper. Res., vol. 9, no. 3, pp. 296-320, 1961.
22. T. Cormen, C. Leiserson, and R. Rivest, Introduction to Algorithms, 2nd ed. Cambridge, MA: MIT Press, 2001.
23. L. Schruben, SIGMA User's Guide, Dept. Industrial Eng. Oper. Res., Univ. California, Berkeley, 2000.
24. D. Hetherington and D. Stein, "Recent advances in endpoint and in-line monitoring techniques for chemical-mechanical polishing processes," in Proc. CMP-MIC Conf., Santa Clara, CA, 2001, pp. 315-323.
25. S. Ding, J. Yi, M. T. Zhang, and R. Akhavan-Tabatabaei, "Performance evaluation and schedule optimization of multicluster tools with stochastic process times," in Proc. IEEE Conf. Automat. Sci. Eng., Shanghai, China, 2006.