Petri net-based scheduling of single-arm cluster tools with reentrant atomic layer deposition processes

IEEE Transactions on Automation Science and Engineering

Volumn 8, Issue 1, 2011, Pages 42-55

  Wu, Naiqi ^a   Chu, Feng ^b   Chu, Chengbin ^c   Zhou, Mengchu ^d,e  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF EVRY   (France)

^c ECOLE CENTRALE PARIS   (France)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^e TONGJI UNIVERSITY   (China)

Author keywords

Cluster tools; optimization; Petri nets (PNs); scheduling; semiconductor fabrication

Indexed keywords

DEPOSITION; OPTIMIZATION; PETRI NETS; SCHEDULING; SILICON WAFERS; TOOLS;

ANALYTICAL EXPRESSIONS; ANALYTICAL METHOD; CLUSTER TOOL; DEADLOCK AVOIDANCE; PETRI NETS (PNS); PROCESSING MODULES; SEMI-CONDUCTOR FABRICATION; WAFER FABRICATIONS;

ATOMIC LAYER DEPOSITION;

EID: 85027957575     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2010.2046736     Document Type: Article

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