Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

IEEE Transactions on Automation Science and Engineering

Volumn 12, Issue 3, 2015, Pages 1125-1139

  Qiao, Yan ^a   Pan, Chun Rong ^b   Wu, Nai Qi ^a,c   Zhou, Mengchu ^d,e  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b JIANGXI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^c MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^d Department of Computer Science and Technology   (China)

^e NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cluster tools; failure response; Petri net; scheduling; semiconductor manufacturing

Indexed keywords

MANUFACTURE; PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

CLUSTER TOOL; DYNAMIC BEHAVIORS; FAILURE RESPONSE; FEASIBLE SCHEDULE; PERIODIC SCHEDULE; PETRI NET MODELS; SCHEDULING PROBLEM; SEMICONDUCTOR MANUFACTURING;

TOOLS;

EID: 85027922358     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2014.2312823     Document Type: Conference Paper

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