A petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting

IEEE Transactions on Semiconductor Manufacturing

Volumn 26, Issue 1, 2013, Pages 100-110

  Qiao, Yan ^a   Wu, Naiqi ^a   Zhou, Mengchu ^b,c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b Department of Computer Science and Technology   (China)

^c NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cluster tools; optimization; scheduling; semiconductor manufacturing

Indexed keywords

CLUSTER TOOL; CYCLE TIME; CYCLIC SCHEDULES; ILLUSTRATIVE EXAMPLES; PAPER MODELS; PETRI NET MODELS; RESEARCH RESULTS; SCHEDULING METHODS; SEMICONDUCTOR MANUFACTURING; TIMED PETRI NET; WAFER FABRICATIONS;

ATOMIC LAYER DEPOSITION; OPTIMIZATION; PETRI NETS; SCHEDULING; TOOLS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84873384586     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2012.2222945     Document Type: Article

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