Scheduling transient periods of single-armed cluster tools

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2012, Pages 5062-5067

  Lee, Jun Ho ^a   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

cluster tools; deadlock analysis; dummy wafers; Petri nets; scheduling; transient periods

Indexed keywords

COMPUTATIONAL EFFICIENCY; HEURISTIC ALGORITHMS; INTEGER PROGRAMMING; PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

CLUSTER TOOL; COMPUTATIONAL EXPERIMENT; DEADLOCK ANALYSIS; DUMMY WAFERS; MIXED INTEGER PROGRAMMING MODEL; OPERATIONAL BEHAVIOR; SEMICONDUCTOR MANUFACTURING; TRANSIENT PERIODS;

SILICON WAFERS;

EID: 84864421810     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICRA.2012.6225327     Document Type: Conference Paper

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