Scheduling start-up and close-down periods of dual-armed cluster tools with wafer delay regulation

International Journal of Production Research

Volumn 50, Issue 10, 2012, Pages 2785-2795

  Kim, Tae Kyu ^a   Jung, Chihyun ^a   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Close down; Cluster tools; Scheduling; Start up; Transient periods; Wafer delay

Indexed keywords

EID: 85023501284     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207543.2011.590949     Document Type: Article

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