Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets

IEEE Transactions on Automation Science and Engineering

Volumn 9, Issue 2, 2012, Pages 446-454

  Wu, Nai Qi ^a   Zhou, Mengchu ^b,c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b Department of Computer Science and Technology   (China)

^c NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Automated manufacturing system; cluster tools; discrete event system; optimization; Petri net (PN); scheduling; semiconductor fabrication

Indexed keywords

ACTIVITY TIME; AUTOMATED MANUFACTURING SYSTEMS; CLUSTER TOOL; CYCLE TIME; IN-PROCESS; OFFLINE; ON-WAFER; OPERATIONAL ARCHITECTURE; OPERATIONAL ISSUES; PERIODIC SCHEDULE; PETRI NET MODELS; REAL-TIME CONTROLLERS; SCHEDULABILITY; SEMI-CONDUCTOR FABRICATION; SEMICONDUCTOR MANUFACTURING; SOJOURN TIME; STEADY-STATE OPERATION; TIME CONSTRAINTS; WAIT TIME;

DISCRETE EVENT SIMULATION; OPTIMIZATION; PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

TOOLS;

EID: 84859753478     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2011.2178023     Document Type: Article

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