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Volumn 2004, Issue 5, 2004, Pages 5301-5306

Petri net modeling and Lagrangian relaxation approach to vehicle scheduling in 300mm semiconductor manufacturing

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; AUTOMATION; DECISION MAKING; FUNCTIONS; INTEGER PROGRAMMING; LAGRANGE MULTIPLIERS; MATHEMATICAL MODELS; PETRI NETS; PROBLEM SOLVING; SCHEDULING; SYNCHRONIZATION;

EID: 3042550235     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (21)

References (13)
  • 2
    • 3042610627 scopus 로고    scopus 로고
    • An effective OHT dispatch policy for 300mm AMHS management
    • Taipei, September
    • H.-S. Fu, D.-Y. Liao, "An effective OHT dispatch policy for 300mm AMHS management," Proc. of 2001 SEMICON Taiwan, Taipei, September 2001.
    • (2001) Proc. of 2001 SEMICON Taiwan
    • Fu, H.-S.1    Liao, D.-Y.2
  • 4
    • 0036351167 scopus 로고    scopus 로고
    • Modelling and performance evaluation of an overhead hoist transport system in a 300mm fabrication plant
    • C.-H. Kuo, "Modelling and performance evaluation of an overhead hoist transport system in a 300mm fabrication plant," Int. J. Adv. Manuf. Technol., Vol. 20, pp. 133-161, 2002.
    • (2002) Int. J. Adv. Manuf. Technol. , vol.20 , pp. 133-161
    • Kuo, C.-H.1
  • 6
    • 0024645936 scopus 로고
    • Petri nets: Properties, analysis and applications
    • April
    • T. Murata, "Petri nets: properties, analysis and applications," Processings of the IEEE, Vol. 77, No. 4, pp. 541-580, April 1989.
    • (1989) Processings of the IEEE , vol.77 , Issue.4 , pp. 541-580
    • Murata, T.1
  • 9
    • 0034634803 scopus 로고    scopus 로고
    • Unidirectional circular layout for overhead material handling systems
    • J.-H. Ting and J. M. A. Tanchoco, "Unidirectional circular layout for overhead material handling systems," Int. Journal of Production Research, Vol. 38, No. 16, pp. 3913-3935, 2000.
    • (2000) Int. Journal of Production Research , vol.38 , Issue.16 , pp. 3913-3935
    • Ting, J.-H.1    Tanchoco, J.M.A.2
  • 10
    • 0344444705 scopus 로고    scopus 로고
    • Effective OHT dispatching for differential material handling services in 300mm wafer foundry
    • Taipei, Taiwan, Sep.
    • C.-N. Wang and D.-Y. Liao, "Effective OHT dispatching for differential material handling services in 300mm wafer foundry," Proc. of 2003 IEEE Intern. Conf. on Robotics and Automation, Taipei, Taiwan, Sep. 2003.
    • (2003) Proc. of 2003 IEEE Intern. Conf. on Robotics and Automation
    • Wang, C.-N.1    Liao, D.-Y.2
  • 11
    • 0032141060 scopus 로고    scopus 로고
    • Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach
    • August
    • M.-C. Zhou and M.-D. Jeng, "Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: a Petri net approach," IEEE Trans. on Semiconduct. Manufact., Vol. 11, No. 3, pp. 333-357, August 1998.
    • (1998) IEEE Trans. on Semiconduct. Manufact. , vol.11 , Issue.3 , pp. 333-357
    • Zhou, M.-C.1    Jeng, M.-D.2
  • 13
    • 0031348492 scopus 로고    scopus 로고
    • The surrogate gradient algorithm for Lagrangian relaxation method
    • San Diego, CA USA, Dec.
    • X. Zhao, P. B. Luh and J. Wang, "The surrogate gradient algorithm for Lagrangian relaxation method," Proc. of the 36th Conf. on Decision & Control, pp. 305-310, San Diego, CA USA, Dec. 1997.
    • (1997) Proc. of the 36th Conf. on Decision & Control , pp. 305-310
    • Zhao, X.1    Luh, P.B.2    Wang, J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.