Noncyclic scheduling for timed discrete-event systems with application to single-armed cluster tools using pareto-optimal optimization

IEEE Transactions on Automation Science and Engineering

Volumn 10, Issue 3, 2013, Pages 699-710

  Wikborg, Uno ^a   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cluster tool; Dynamic programming; Multiobjective; Noncyclic; Scheduling; State dependent

Indexed keywords

CLUSTER TOOL; MULTI OBJECTIVE; MULTI-OBJECTIVE PROBLEM; MULTI-OBJECTIVE SHORTEST PATH PROBLEMS; NONCYCLIC; PARETO OPTIMAL SOLUTIONS; SEMICONDUCTOR MANUFACTURING; STATE-DEPENDENT;

DYNAMIC PROGRAMMING; GRAPH THEORY; OPTIMIZATION; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

PROBLEM SOLVING;

EID: 84892570718     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2012.2217128     Document Type: Article

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