Scheduling analysis of time-constrained dual-armed cluster tools

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 3, 2003, Pages 521-534

  Kim, Ja Hee ^a   Lee, Tae Eog ^a   Lee, Hwan Yong ^a   Park, Doo Byeong ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Jusung Engineering Company Limited   (South Korea)

Author keywords

Cluster tool; Scheduling; Swap; Time constraint

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GASES; INDUSTRIAL ROBOTS; PRODUCTION ENGINEERING; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

CLUSTER TOOL; RESIDUAL GASES; SWAP; SWAP OPERATION; TIME CONSTRAINT; WAFER HANDLING ROBOT;

SILICON WAFERS;

EID: 0041384559     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.815203     Document Type: Article

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