Systems of multiple cluster tools: Configuration, reliability, and performance

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 2, 2003, Pages 170-178

  López, Marcel J ^a   Wood, Samuel C ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Cardean University   (United States)

Author keywords

Flexible manufacturing systems; Manufacturing planning; Manufacturing scheduling; Performance models; Semiconductor cluster tools; Semiconductor device manufacture

Indexed keywords

FLEXIBLE MANUFACTURING SYSTEMS; MICROPROCESSOR CHIPS; PLANNING;

MULTIPLE CLUSTER TOOLS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0038291984     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.810936     Document Type: Article

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