A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints

IEEE Transactions on Semiconductor Manufacturing

Volumn 21, Issue 2, 2008, Pages 224-236

  Wu, Naiqi ^a,b,c   Chu, Chengbin ^c   Chu, Feng ^c   Zhou, Meng Chu ^a,d  

^a IEEE

^b GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^c UNIVERSITÉ DE TECHNOLOGIE DE TROYES   (France)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Automated manufacturing system; Cluster tool; Petri nets (PN); Schedulability; Scheduling; Semiconductor manufacturing

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MATHEMATICAL MODELS; PETRI NETS; ROBOTS; SCHEDULING;

AUTOMATED MANUFACTURING SYSTEM; CLUSTER TOOL;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 43849109024     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2008.2000425     Document Type: Conference Paper

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